Micro-Electro-Mechanical Systems (MEMS) are tiny machines that integrate "mechanical elements, sensors, actuators, and electronics…through the utilization of microfabrication technology." This site provides a good introduction to MEMS, how they are built, and how they operate. The most descriptive section is The Beginner’s Guide to MEMS Processing, which explains the processes of deposition,...

All About MEMS is a "community-oriented website devoted to the full range of information available about MicroElectroMechanical Systems." Visitors will find a wide array of background information, definitions, MEMS applications, and much more. Details on how MEMS are fabricated are provided, and recent advances in MEMS development are highlighted. A special look at the use of MEMS in wireless...

This interdepartmental lab, working under the umbrella of Massachusetts Institute of Technology's School of Engineering, supports research on "solid state devices, integrated circuits and systems, materials for electronic applications, novel process technologies, MicroElectroMechanical devices (sensors and actuators), biomedical applications, and computer-aided fabrication." The Microsystems...