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View Resource About MEMS Technology

Micro-Electro-Mechanical Systems (MEMS) are tiny machines that integrate "mechanical elements, sensors, actuators, and electronics…through the utilization of microfabrication technology." This site provides a good introduction to MEMS, how they are built, and how they operate. The most descriptive section is The Beginner’s Guide to MEMS Processing, which explains the processes of deposition,...

http://www.memsnet.org/mems/what_is.html
View Resource The University of Illinois at Urbana-Champaign: Rogers Physical Chemistry Research Group

The Rogers research group at the University of Illinois at Urbana-Champaign studies "soft materials for flexible 'macroelectronic' circuits, nanophotonic structures, microfluidic devices, and microelectromechanical systems." Researchers can learn the details about the group's four current research projects: plastic and molecular electronics, microfluidics and liquid crystals for photonics,...

http://rogersgroup.northwestern.edu