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Microelectromechanical systems -- Power supply.

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View Resource All About MEMS

All About MEMS is a "community-oriented website devoted to the full range of information available about MicroElectroMechanical Systems." Visitors will find a wide array of background information, definitions, MEMS applications, and much more. Details on how MEMS are fabricated are provided, and recent advances in MEMS development are highlighted. A special look at the use of MEMS in wireless...

https://www.mems-exchange.org/MEMS/what-is.html