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About MEMS Technology

Micro-Electro-Mechanical Systems (MEMS) are tiny machines that integrate "mechanical elements, sensors, actuators, and electronics…through the utilization of microfabrication technology." This site provides a good introduction to MEMS, how they are built, and how they operate. The most descriptive section is The Beginner’s Guide to MEMS Processing, which explains the processes of deposition, lithography, and etching. For each of these, there are illustrations that show what happens at the microscopic level. Other sections tell the history and current direction of research and development, as well as the challenges that face this growing technology.
Alternate Title
About Micro-Electro-Mechanical Systems Technology
Archived Scout Publication URL
Date of Scout Publication
June 21st, 2002
Date Of Record Creation
April 7th, 2003 at 5:44pm
Date Of Record Release
April 7th, 2003 at 5:44pm
Resource URL Clicks


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