The mission of the Microelectronics Research Center of Georgia Tech is "to facilitate research on a variety of new materials, device structures, and micro-electromechanical systems." The group has established a silicon CMOS processing baseline and a procedure for equipment and processing training, which it calls the Platform. The Center makes the Platform available to the Georgia Tech community and to other research communities worldwide. The components of the Platform, which include baselines, research, people, training and services, are described on this website. The Documents section includes information on the equipment as well as recipes and seminar notes, which are free to download. Some sections of the website are only accessible to group members.
(no comments available yet for this resource)