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Georgia Tech: Microelectronics

The mission of the Microelectronics Research Center of Georgia Tech is "to facilitate research on a variety of new materials, device structures, and micro-electromechanical systems." The group has established a silicon CMOS processing baseline and a procedure for equipment and processing training, which it calls the Platform. The Center makes the Platform available to the Georgia Tech community and to other research communities worldwide. The components of the Platform, which include baselines, research, people, training and services, are described on this website. The Documents section includes information on the equipment as well as recipes and seminar notes, which are free to download. Some sections of the website are only accessible to group members.
Archived Scout Publication URL
Date of Scout Publication
March 25th, 2005
Date Of Record Creation
March 24th, 2005 at 11:13am
Date Of Record Release
March 28th, 2005 at 3:41pm
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